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Refrigerant Chiller Product List

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Low GWP refrigerant chiller "RJ-XA type"

Low GWP refrigerant chiller "RJ-XA type"

Low GWP refrigerant chiller "RJ-XA type"

We would like to introduce our semiconductor manufacturing equipment chiller, the 'RJ-XA model'. It uses a low GWP refrigerant (R513A) that complies with global environmental regulations. It also achieves reduced power consumption through inverter control. Additionally, as an optional specification, it is available in a version that does not use copper or brass materials in the fluid contact parts, which helps reduce the risk of corrosion. 【Features】 ■ Low GWP refrigerant R513A adopted (GWP = 629) ■ Precise temperature control ■ Energy-saving ■ Space-saving ■ Copper and brass-free (optional) *For more details, please download the PDF or feel free to contact us.

  • Chiller
  • Refrigerant Chiller

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Natural refrigerant chiller "RJ-CA type"

Natural refrigerant chiller "RJ-CA type"

Non-fluorinated chiller for semiconductor manufacturing equipment using natural refrigerant (CO2)

The "RJ-CA type" is a chiller for semiconductor manufacturing equipment that uses natural refrigerant (CO2). With a built-in ultra-compact canned pump and Ebara's inverter control technology, it enables space-saving and energy-saving features. Additionally, it allows for temperature control within ±0.1°C, contributing to improved process stability and yield. 【Features】 ■ Uses natural refrigerant (CO2) (GWP = 1) ■ Precise temperature control ■ Energy-saving ■ Space-saving *For more details, please download the PDF or feel free to contact us.

  • Chiller
  • Refrigerant Chiller

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Natural refrigerant chiller 'GX-20'

Natural refrigerant chiller 'GX-20'

No use of freon! Energy savings of 20% are possible with the use of high-efficiency motors.

The "GX-20" is a natural refrigerant chiller that does not use high GWP refrigerants, including alternative fluorocarbons. With improvements in high-efficiency motors and controls, it reduces power consumption and minimizes installation space with a smaller size. Additionally, it allows for a wide temperature control range from -20°C to +70°C. Please feel free to contact us if you have any inquiries. 【Features】 ■ Uses carbon dioxide (CO2) as a refrigerant ■ 20% energy savings through the use of high-efficiency motors ■ Wide temperature control range: -20°C to +70°C ■ Space-saving: 8% reduction in installation area compared to MX-20 *For more details, please refer to the PDF materials or feel free to contact us.

  • Cooling system
  • Refrigerant Chiller

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